This course provides basic understanding on the design, fabrication and system development aspects of microelectronics/ microsystems. This enables to understand and apply common principles of sensing and actuation at micro/ nanoscale. The course also gives a broad perspective of application areas and commercialization aspects of MEMS and microsystems.

Topics:

• Sensing and actuation principles of Microsystems

• Introduction to Microsystems Design

• Electromechanical Transduction in MEMS

• Microelectronics technologies for MEMS and Micromachining

  • Dopant diffusion & Ion-implantation in Silicon

  • Thin film deposition and growth (Specific to MEMS)

  • Lithography: Single Side and Double Side Lithography

  • Etching/micromachining

  • Polymer MEMS

• Foundry MEMS processes

• Microelectronics-Microsystems Integration

• Bonding & Packaging of MEMS

• MEMS Micro sensors, Actuators, Applications& Case studies

  • MEMS Inertial Sensors, Pressure Sensors, Temperature Sensor, Environmental Sensors.

  • Case studies: Design + Materials + Microsystem Technology + Application

Same as Reference

1. Chang Liu, Foundations of MEMS, Pearson Education, 2011.

2. S. D. Senturia, Microsystem Design, Springer, 2005.

3. James D Plummer, Michael D Deal, Peter B. Griffin, Silicon VLSI Technology- Fundamentals, Practice And Modeling, Pearson (2009)

4. G. K. Ananthasuresh , K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat , V. K. Aatre Micro and Smart Systems, Wiley.

5. MinhangBao "Analysis and Design Principles of MEMS Devicess", Elsevier B.V, 2009.

6. MarcMadau, Fundamentals of Microfabrication Science of Miniaturization, CRC Press.

Course Outcomes (COs):

CO1: Understand and apply common principles of sensing and actuation at micro/nanoscale

CO2: Understand fundamental concepts on the design and analysis of electromechanical behavior of MEMS and Microsystems

CO3: Attains familiarity on the materials and good understanding on the fabrication processes for realization of microsystems

CO4: Gains a broad perspective on the application areas of Microsystems and integrated CMOS-MEMS systems and develops ability to develop Microsystems based sensors and systems for practical applications