Introduction to RF MEMS, , Electrical and mechanical modelling of MEMS devices,
MEMS Switches: Introduction to MEMS switches; Capacitive shunt and series
switches: Physical description, circuit model and electromagnetic modelling;
Techniques of MEMS switch fabrication and packaging; Design of MEMS switches.
RF Filters and Phase Shifters: Modeling of mechanical filters, micromachined filters,
surface acoustic wave filters, micromachined filters for millimeter wave frequencies;
Various types of MEMS phase shifters; Ferroelectric phase shifters.
MEMS Varactor, MEMS Resonators
micromachined waveguide components; Micromachined antennas: Micromachining
techniques to improve antenna performance, reconfigurable antennas.
Integration and Packaging for RF MEMS: Role of MEMS packages, types of MEMS
packages, module packaging, packaging materials and reliability issues.

1. Varadan, V.K., Vinoy, K.J. and Jose, K.J., “RF MEMS and their Applications”, John Wiley & Sons. 2002.
2. Rebeiz, G.M., “MEMS: Theory Design and Technology”, John Wiley & Sons. 1999.
3. De Los Santos, H.J, “RF MEMS Circuit Design for Wireless Communications”, Artech House. 1999
4. Research papers and study material of Clark T.-C. Nguyen, Electrical Engineering and Computer Sciences , UC Berkeley Nguyen Book to be added