Module 1: Design and simulation
This module focuses on design and simulation aspects of sensors, actuators and sensor
systems. The laboratory course provides an overview of numerical and analytical
modelling and design of microsystems using leading softwares in the field such as
TCAD for MEMS
Module 2 Fabrication and characterization of MEMS devices
1. Familiariztion of unit processes
2. Familiarization of analytical characterization techniques: thin film thickness measurement , 4-point probe for sheet resistance measurement, micro-stylus step height measurement, AFM, FTIR, XRD, SEM, ,LDV, Nanoindentation
3. Fabrication of MEMS structures such as Microcantilever beam/suspended membrane etc..

4. Characterization of MEMS structures

(List same as that for the theory courses on MEMS and Thin films)